Cleaning and drying of electronic assemblies

Apparatus for cleaning and drying components comprising:

• a reservoir for a highly fluorinated compound;
• heating means for heating and evaporating said highly fluorinated compound;
• a cleaning chamber;
• an organic liquid solvent in said cleaning chamber;
• a space above said organic solvent in said cleaning chamber;
• means for conducting highly fluorinated compound vapor produced by said heating and evaporating means to said cleaning chamber for covering said organic solvent in said cleaning chamber;
• said components to be cleaned being immersed into and removed from said organic solvent in said cleaning chamber;
• means for condensing said highly fluorinated compound vapor in said cleaning chamber;
• means for recycling said highly fluorinated compound and organic solvent to said reservoir and cleaning chamber, respectively;
• a plurality of cleaning compartments in said cleaning chamber, each compartment having a base;
• a separate outlet duct means connected to each base of a respective cleaning compartment;
• a further duct interconnecting said outlet duct means at positions thereof remote from said bases for connecting said outlet duct means to said recycling means;
• and
• liquid highly fluorinated compound at least partially filling said outlet duct means for preventing mixing of said organic liquid in said different compartments at said bases thereof.