Detector for magnetism using a resistance element
AssigneeWacoh Corporation
InventorKazuhiro Okada
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AssigneeWacoh Corporation
InventorKazuhiro Okada
Estimating the term…
A force detector is comprised of resistance elements having a piezo resistance effect such that electric resistance varies due to mechanical deformation, and formed on a single crystal substrate (10), and a strain generative body (20) having a supporting portion (21) and a working portion (23), thus allowing the resistance elements to produce a mechanical deformation on the basis of a displacement with respect to the supporting portion of the working portion. This force detector can detect a force applied to the working portion as changes in resistance values of the resistance elements. The plane on which resistance elements are to be formed on the single crystal substrate is selected so that piezo resistance coefficients in two directions perpendicular to each other exhibit peak. When a weight body (30) is connected to the working portion, it is possible to detect an acceleration acting on the weight body. Moreover, when a magnetic body (330) is connected to the working portion, it is possible to detect a nagnetic force acting on the magnetic body. By using the detector system for acceleration in common to the detector system for magnetic force to perform a compensation computation, detection of a magnetic force which is not influences by acceleration can be made. By devising an arerangement of resistance elements in either detector, it is possible to independently determine magnitudes of objects to be measured with respect to directions of the three-dimensional coordinate system, respectively.
A magnetism detector for detecting magnetism in at least two axial directions in a three-dimensional coordinate system expressed by three axes of X, Y and Z, the detector comprising:
A magnetism detector comprising:
A magnetism detector for detecting magnetism in at least two axial directions in a three-dimensional coordinate system expressed by three axes of X, Y and Z, the detector comprising:
A magnetism detector comprising:
Dependencies are inferred from the claim text.