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US 5,182,453 AGranted
Ion scattering spectrometer
AssigneeShimadzu Corporation
InventorShigeki Hayashi
Life of this patent
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AssigneeShimadzu Corporation
InventorShigeki Hayashi
Estimating the term…
In a coaxial impact collision ion scattering spectrometer (CAICISS), a Wien filter composed of a pair of electrodes 13 and a magnet 20 is placed in the flying path of the ions. The Wien filter acts as (a) a chopper for intermittently chopping ion beam irradiated onto the sample 17, and as (b) a filter that directs only ions having predetermined mass and electrical charges toward an aperture 16 and deviates other ions or non-ionized atoms from the aperture 16. Thus non-ionized atoms or impurity ions having different mass or electric charge are prevented from irradiating the sample 17. In another CAICISS, the axis A of the ion source 11 is set oblique to the axis B of the ion beam irradiated onto the sample 14, and only ions having predetermined mass and electrical charges are deflected from the axis A to the axis B by a pair of deflecting electrodes 13.
An ion scattering spectrometer for irradiating ions intermittently onto a sample and measuring the energy of ions scattered backward by the sample, the ion scattering spectrometer comprising:
An ion scattering spectrometer for irradiating ions onto a sample and measuring the energy of ions scattered backward by the sample, the ion scattering spectrometer comprising:
Dependencies are inferred from the claim text.