Method of making an integrated circuit with capacitor
AssigneeTexas Instruments Incorporated
InventorsKevin M. Ovens, Jeffrey A. Niehaus
Life of this patent
Estimating the term…
Abstract
An integrated circuit (42) is formed in a semiconductor layer (50) having a defined area. Functional circuitry (12) is formed in semiconductor layer (50) to occupy only a portion of the defined area of semiconductor layer (50), and thus defining an unoccupied area of semiconductor layer (50). A capacitor is formed in semiconductor layer in a substantial portion of the unoccupied area.
Claims5
A method of fabricating an integrated circuit comprising the steps of:
- forming a layer of semiconductor;
- fabrication functional circuitry in the semiconductor layer such that the functional area occupies only a first portion of the semiconductor layer of the semiconductor layer;
- and
- forming a capacitor in a second remaining portion of the semiconductor layer not used to form the functional circuitry, to provide a capacitor across the area of the semiconductor layer not utilized by the functional circuitry.
The method of fabricating an integrated circuit having an integrated bypass capacitor comprising the steps of:
- forming a layer of semiconductor of a first conductivity type to have a defined area;
- forming functional circuitry in said layer of semiconductor to occupy only a portion of the defined area and thus defining an unoccupied area of the layer of semiconductor;
- forming a diode cathode in the layer of semiconductor of a layer of heavily doped material of a second conductivity type opposite the first conductivity type;
- forming an intermediate layer in the cathode of a layer of doped material of the second conductivity type, such that the dopant concentration of the intermediate layer is substantially less than the dopant concentration of the cathode;
- forming an anode in the intermediate layer of a layer of heavily doped material of the first conductivity type;
- forming a plurality of metal contacts to said cathode;
- forming a plurality of metal contacts to said anode;
- coupling the plurality of metal contacts to the cathode to at least one power input terminal;
- and
- coupling the plurality of metal contacts to the anode to at least one ground terminal of the integrated circuit.
A method of fabricating an integrated circuit comprising the steps of:
- forming a layer of semiconductor material;
- fabricating at least one semiconductor device in the semiconductor layer such that the semiconductor device occupies only a first portion of the semiconductor device occupies only a first portion of the semiconductor layer;
- and
- forming a capacitor in and through out the remaining portion of the semiconductor layer not used to form said at least one semiconductor device, to provide a capacitor across and through out the area of the semiconductor layer not utilized by the at least on semiconductor device.
Dependencies are inferred from the claim text.