Boron nitride boat and process for producing it
AssigneePraxair S.T. Technology, Inc.
InventorRobert L. Finicle
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Abstract
A pyrolytic boron nitride boat having a cavity suitable for use in growing and doping semi-conductor crystals such as gallium arsenide and said cavity having a roughened surface formed of substantially uniform projected no nodules, disturbances, or ridges.
Claims8
A pyrolytic boron nitride boat having a cavity and said pyrolytic boron nitride comprising a multi-laminated structure of boron nitride in which each lamina of the multi-laminated structure of the boron nitride defining said cavity has a nodular surface and wherein said nodular surface of the top lamina is composed of a substantially uniform distribution of projected nodules in which the average height of the projected nodules is at least two times greater than the thickness of the boron nitride top lamina.
Dependencies are inferred from the claim text.