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US 5,182,132 AGranted
Magnetic recording medium and method for making it
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsMikio Murai, Kiyoshi Takahashi, Masaru Odagiri, Yoshiaki Kai, Takashi Suzuki, Toshiaki Kunieda
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Abstract
In making a magnetic recording medium, a diamond-like carbon film is formed stably with high product efficiency such as 200 .ANG./sec, without occurrence of irregular discharge, and improved still durability and reduced head contamination are achieved by utilizing a.c. plasma discharge or a.c. plasma discharge superimposed by d.c. power and the lubricant film.
Claims4
A method for making a magnetic recording medium comprising the steps of:
- forming a ferromagnetic metal thin film on a substrate,
- forming a polymer film on said ferromagnetic metal thin film
- forming a diamond-like carbon film on said polymer film by plasma CVD method utilizing a.c. power (voltage Vac) in the frequency range of 80 Hz to 200 kHz which has peak voltage more than +500 V and hydrocarbon having a least 3 carbon atoms as material gas, and
- forming a lubricant film on said diamond-like carbon film.
1 more element
Dependencies are inferred from the claim text.