Chemisorptive metal alloy and method of using the same
AssigneeMannesmann Aktiengesellschaft
InventorOtto Bernauer
Life of this patent
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Abstract
A chemisorptive metal alloy includes from about 30% to about 70% by weight of Ti and/or Zr and from about 30% to about 70% by weight of Cu. Optionally, the alloy may also contain from 0% to about 5% by weight of Fe; from 0% to about 10% by weight of Ni; from 0% to about 5% of V; and from 0% to about 5% of Cr. A method of purifying a reactive gas and removing foreign impurities therefrom includes conducting the impurities containing reactive gas, such as chlorine, hydrogen chloride, silane and dichlorosilane, through a bed of the above described pulverized metal alloy and removing the impurities from the gas by chemisorption on the alloy.
Claims5
A method of purifying a reactive gas comprising one or both of the group consisting of chlorine and hydrogen chloride, containing one or more impurities selected from the group consisting of hydrogen, oxygen, argon, nitrogen, carbon monoxide and carbon dioxide, comprising:
- conducting said impurities containing reactive gas through a bed of pulverized metal alloy and removing said impurities from said gas by chemisorption on said alloy;
- said alloy comprising from about 30 to about 70% by weight of at least one of Ti and Zr;
- and
- from about 70 to about 30% by weight of Cu.
Dependencies are inferred from the claim text.