Removal of gaseous hydrides
AssigneeL'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
InventorsPaul Leondaridis, Albert S. Vendel, Tarranum Akthar
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Abstract
A metallic oxide catalyst, containing cupric oxide and an amount of one or more of AgO, HgO or CdO effective for enhancing the ability of the catalyst for removing gaseous hydrides from a gas stream.
Claims14
A method for removing gaseous hydrides from a carrier gas stream, which comprises contacting said gas stream with a metallic oxide composition consisting essentially of cupric oxide and from 0.1 to 10% by weight, based on the total weight of the composition, of one or more compounds selected from the group consisting of AgO, HgO and CdO;
- and wherein said gaseous hydride is selected form the group consisting of silane, disilane, trisilane, germane, arsine, phosphine and diborane.
A method for removing gaseous hydrides from a carrier gas stream, which comprises contacting said gas stream with a metallic oxide composition consisting essentially of cupric oxide and zinc oxide and from 0.1 to 10% by weight, based on the total weight of the composition, of one or more compounds selected from the group consisting of AgO, HgO and CdO;
- and wherein said gaseous hydride is selected from the group consisting of silane, disilane, trisilane, germane, arsine, phosphine and diborane.
Dependencies are inferred from the claim text.