Apparatus for processing semiconductors
AssigneeTokyo Electron Sagami Limited
InventorsKazunari Sakata, Katsumi Ishii, Kenichi Yamaga
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Abstract
A semiconductor processing apparatus comprises a main body having an air passage, a plurality of filter units connected in series with the air passage in the main body, each filter unit having an air intake port, an air otlet port and an air blower, the air intake port of each filter unit communicating with the air outlet ports of the filter units disposed upstream side of the air passage, and a mechanism for arranging articles to be processed close to the air outlet port of each filter unit such that air is supplied to the articles to be processed after the air has passed through the corresponding filter units.
Claims10
A semiconductor processing apparatus comprising:
- a main body having an air passage;
- at least first and second filter units connected in series to said air passage in said main body, said first filter unit having a first air outlet port, first air blowing means and a first air intake port structured so as to take, into said main body, air flowing inside a room in which said semiconductor processing apparatus is installed, said second filter unit being disposed downstream of said first filter unit and having second air blowing means, a second air outlet port and a second air intake port communicating with said first air outlet port of said first filter unit;
- exhausting means for exhausting air passed through said first and second filter units outside said main body;
- and
- means for arranging articles to be processed close to said air outlet port of each of said first and second filter units such that air is supplied to said articles to be processed after said air has passed through said first or second filter unit.
A semiconductor processing apparatus comprising:
- a main body having an air passage;
- at least first and second filter units connected in series with said air passage in said main body, said first filter unit having a first air outlet port, first blowing means, a first air intake port structured so as to take, in said main body, air flowing inside a room in which said semiconductor processing apparatus is installed, and an air return port structured so as to take air flowing inside said main body therein, said second filter unit being disposed downstream of said first filter unit and having second blowing means, a second air outlet port and a second air intake port communicating with said first air outlet port of said first filter unit;
- means for adjusting amounts of air supplied by said first and second filter units so as to return air flowing from said first air outlet port of said first filter unit to said air return port;
- exhausting means for exhausting air passed through said first and second filter units outside said main body;
- and
- means for arranging articles to be processed close to said air outlet port of each of said first and second filter units such that air is supplied to said articles to be processed after said air has passed through said first filter unit or said second filter unit.
A semiconductor processing apparatus comprising:
- a main body having an air passage;
- at least first and second filter units connected in series to said air passage in said main body, said first filter unit having a first air outlet port, first blowing means and a first air intake port structured so as to take, into said main body, air flowing inside a room in which said semiconductor processing apparatus is installed, said second filter unit being disposed downstream of said first filter unit and having second blowing means and a second air intake port communicating with said first air outlet port of said first filter unit;
- exhausting means for exhausting air passed through said first and second filter units outside said main body;
- and
- moving means for moving articles to be processed, said moving means being arranged close to said air outlet port of each of said first and second filter units such that air is supplied to articles to be processed after said air has passed through said first filter unit or said second filter unit.
Dependencies are inferred from the claim text.