Surface emission type semiconductor laser
AssigneeSeiko Epson Corporation
InventorsKatsumi Mori, Tatsuya Asaka, Hideaki Iwano
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AssigneeSeiko Epson Corporation
InventorsKatsumi Mori, Tatsuya Asaka, Hideaki Iwano
Estimating the term…
A surface emission type semiconductor laser includes a plurality of semiconductor layers defining at least one resonator in a direction perpendicular to the semiconductor substrate of the laser, the layers including at least a cladding layer in the semiconductor layers being formed into at least one column-like light emitting portion extending in a direction perpendicular to the semiconductor substrate, and a II-VI group compound semiconductor epitaxial layer buried around the column-like portion. An active layer of multi-quantum well structure is further formed on the layer section of the cladding layer having the column-like portion. If a plurality of column-like portions are formed, these column-like portions are separated from one another by a separation groove terminating short of the active layer, the II-VI group compound semiconductor epitaxial layer being buried in the separation groove. Particularly, when it is desired to produce a phase synchronization type semiconductor laser, a waveguide layer is formed below the active layer, and the waveguide layer is adapted to propagate light rays in a direction parallel to the active layer.
A surface emission type semiconductor laser for emitting a laser beam in a direction perpendicular to a semiconductor substrate in which said laser is formed, said semiconductor laser comprising:
Dependencies are inferred from the claim text.