US 5,181,154 AGranted

Circuit arrangement for optimal current generation in processes of electrochemically initiated plasma-chemical layer production

AssigneeJenoptik Aktiengesellschaft

InventorsJens Haupt, Kirstin Haupt, Henry Hornhauer

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Abstract

A circuit arrangement for current supply in processes of electrochemically initiated plasma-chemical layer production. It is preferably applied in the plasma-chemical conversion of electrochemically pre-formed layers, e.g. on light metals. The output of the adjustable three-phase transformer with subsequently connected 6-pulse rectifier circuit is branched twice, wherein a first bridge circuit comprises a capacitor connected in parallel to a voltage sensor. A second bridge circuit contains a freewheeling diode parallel to the current limiting choke and the bath for process implementation. A pulse analyzer is arranged parallel to the latter, and the two bridge circuits are separated by a switch element. An optoelectronic sensor which is connected with the control unit, as is the pulse analyzer, the voltage sensor and a current sensor, is introduced for indicating the pulsed plasma discharges controlled by the circuit arrangement, wherein the control unit influences the switch element with the three-phase transformer in a directed manner to optimally adjust the pulse frequency and duty factor.

Circuit arrangement for the current supply in processes of electrochemically initiated plasma-chemical layer production comprising:

a controllable direct voltage source;
a bath for the process implementation and respective control electronics;
an adjustable three-phase transformer with a subsequently connected 6-pulse rectifier circuit being employed as a controllable direct voltage source, wherein the adjustable three-phase transformer carries a control input and the 6-pulse rectifier circuit carries a control output on the current source side and an output on the current sink side;
said output of the 6-pulse rectifier circuit on the current source side contacting the output of the 6-pulse rectifier circuit on the current sink side by way of a current limiting choke, by way of said bath for process implementation connected in parallel with a pulse analyzer, by way of a switch element and by way of a current sensor;
said output of the 6-pulse rectifier circuit on the current source side being branched twice as a bridge circuit with its output on the current sink side;
wherein the first bridge circuit, comprising a parallel connected capacitor with a voltage sensor, contacts the output of the 6-pulse rectifier circuit on the current source side between the switch element and the current sensor via a junction;
and
wherein the second bridge circuit, which contains a freewheeling diode, contacts the input of the current limiting choke after said junction and between the switch element and parallel connection of the pulse analyzer with the bath for process implementation;
an optoelectronic sensor being assigned to the bath for the process implementation;
an additional output of the pulse analyzer, the optoelectronic sensor, the voltage sensor and the current sensor, respectively, contacting inputs of the control electronics;
control electronics being assigned to the adjustable three-phase transformer;
and
an output of the control electronics contacting the switch element.

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Abstract

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