Strained superlattice semiconductor structure
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorNaohito Yoshida
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Abstract
A semiconductor structure for a light-interactive semiconductor device includes first and second crystalline semiconductor cladding layers having a first lattice constant and a strained superlattice structure disposed in contact with and between the first and second cladding layers and including alternating first crystalline semiconductor quantum barrier layers having a first and second crystalline semiconductor quantum well layers having a second energy band gap less than the first energy band gap and a third lattice constant wherein the first lattice constant is approximately equal to the average of the second and third lattice constants and the second lattice constant differs from the third lattice constant by at least 0.5 percent of the second lattice constant.
Claims9
A semiconductor structure for a light-interactive semiconductor device comprising:
- first and second crystalline InP cladding layers having a first lattice constant;
- and
- a strained superlattice structure disposed in contact with and between the first and second InP cladding layers and comprising alternating crystalline In.sub.x Ga.sub.1-x As quantum barrier layers having a first energy band gap and a second lattice constant and crystalline In.sub.y Ga.sub.1-y Ga quantum well layers having a second energy band gap less than the first energy band gap and a third lattice constant wherein the first lattice constant is approximately equal to the average of the second and third lattice constants and the second lattice constant differs from the third lattice constant by at least about 0.5 percent of the second lattice constant.
A light-interactive semiconductor device comprising:
- a semiconductor substrate;
- a first crystalline InP cladding layer disposed on the semiconductor substrate and having a first lattice constant;
- a strained superlattice structure disposed on the first cladding layer and comprising alternating crystalline In.sub.x Ga.sub.1-x As quantum barrier layers having a first energy band gap and a second lattice constant and crystalline In.sub.y Ga.sub.1-y As quantum well layers having a second energy band gap less than the first energy band gap and a third lattice constant wherein the first lattice constant is approximately equal to the average of the second and third lattice constants and the second lattice constant differs from the third lattice constant by at least about 0.5 percent of the second lattice constant;
- a second crystalline InP cladding layer disposed on the strained superlattice structure opposite the first cladding layer;
- and
- first and second electrode respectively disposed on the first and second cladding layers.
A semiconductor laser comprising:
- a first conductivity type InP substrate;
- a first conductivity type crystalline InP cladding layer disposed on the semiconductor substrate and having a first lattice constant;
- a strained superlattice structure disposed on the first cladding layer and comprising alternating crystalline In.sub.x Ga.sub.1-x As quantum barrier layers having a first energy band gap and a second lattice constant and crystalline In.sub.y Ga.sub.1-y As quantum well layers having a second energy band gap less than the first energy band gap and a third lattice constant wherein the first lattice constant is approximately equal to the average of the second and third lattice constants and the second lattice constant differs from the third lattice constant by at least about 0.5 percent of the second lattice constant;
- a second conductivity type crystalline InP cladding layer disposed on the strained superlattice structure opposite the first cladding layer;
- and
- first and second electrodes respectively disposed on the first and second cladding layers.
Dependencies are inferred from the claim text.