Radial field electrostatic micromotor produced using a photolithographic micromanufacturing technique and a process for producing said micromotor

A photolithographic manufacturing process for an electrostatic micromotor said process comprising:

• a)- preferably providing substantially over an entire surface of a substrate a first electrically conducting layer adapted to supply a central ring capable of guiding and contacting a guide part of a rotor of the micromotor,
• b)- providing at least one first electrically insulating layer on said electrically conducting layer,
• c)- forming electrically conducting strips on said first electrically insulating layer, said strips being adapted to supply the stator electrodes by means of a control circuit of the micromotor,
• d)- depositing at least partially on the preceding layers preferably one layer having a protecting function and a function of friction reduction and electrical insulation,
• e)- forming, with interposition of a first sacrificial layer, at least one group of electrodes angularly offset about an axis of rotation of the micromotor as well as simultaneously said guide part of the rotor and at least one counter electrode of the rotor,
• f)- forming above said electrodes and said counter electrodes as well as above said guide part, with interposition of a second sacrificial layer, said central ring as well as at least one bridging element constituting an elevated arm of the rotor adapted to be associated with at least one mechanically or electrically functional member such as a pinion or a wheel,
• g)- and then removing the sacrificial layers by chemical etching.