Process and apparatus for preparing superconducting thin films
AssigneeSumitomo Electric Industries, Ltd.
InventorsKeizo Harada, Hisao Hattori, Hideo Itozaki
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Abstract
A process for preparing a thin film of high-temperature compound oxide superconductor having a large area on a substrate by a magnetron sputtering method. A magnetron electrode on which an elongated target is secuerd has an elongated shape and a substrate which also has an elongated shape are arranged in such a manner that a surface of the substrate makes a predetermined angle which is not zero with respect to the surface of said elongated target. The substrate is moved slowly along a direction which is transverse to the elongated dimension of the target.
Claims12
A process for preparing a thin film of a high-temperature compound oxide superconductor having a large area on a substrate by a magnetron sputtering method, characterized in that a magnetron electrode on which an elongated target is secured has an elongated shape, in that the said substrate also has an elongated shape and is arranged in such a manner that a surface of said substrate makes a predetermined angle which is not zero with respect to said surface of said elongated target, and in that said substrate is moved along a direction which is transverse to the elongated dimension of said target.
A magnetron sputtering apparatus for preparing a thin film of high-temperature compound oxide superconductor having a large surface area on a substrate, comprising an elongated magnetron electrode on which an elongated target is adapted to be secured, an elongated substrate holder on which an elongated substrate is adapted to be secured, said elongated substrate holder being arranged in such a manner that a surface of said elongated substrate makes a predetermined angle which is not zero with respect to said surface of said elongated target, and a means for moving said elongated substrate along a direction which is transverse to the dimension of said elongated magnetron electrode during sputtering operation.
Dependencies are inferred from the claim text.