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US 5,180,686 AGranted
Method for continuously deposting a transparent oxide material by chemical pyrolysis
AssigneeEnergy Conversion Devices, Inc.
InventorsArindam Banerjee, Subhendu Guha
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Abstract
A method of depositing a layer of doped or undoped wide band gap oxide material by chemical spray pyrolysis, upon a continuously advancing, elongated web of substrate material in a continuous, roll-to-roll process.
Claims10
In a process for the continuous fabrication of photovoltaic devices:
- said devices including a substrate;
- a light scattering back reflector including a deposited thin film of silver, and a body of thin film layers of silicon alloy material;
- the improvement comprising the step of:
- continuously depositing, by chemical spray pyrolysis, a layer of zinc oxide material between the thin film of silver of said light scattering back reflector and said layers of silicon alloy material, said pyrolysis deposited layer adapted to (1) enhance the light scattering provided by said back reflector and (2) substantially prevent interdiffusion between said semiconductor body and said back reflector.
1 more element
Dependencies are inferred from the claim text.