Apparatus for pulling monocrystals
AssigneeLeybold Aktiengesellschaft
InventorsDieter Drechsel, Karl Jericho
Life of this patent
Estimating the term…
Abstract
Apparatus includes a crucible, a cover with an opening over the crucible, a pulling element for pulling monocrystal from melt in the crucible, and first and second heating elements. The first element is a substantially flat radiaent heat source below the crucible and the second element is a pot shaped, comprising a flat heat source above the melt and a cylindrical heat source about the crucible. A ring having holes therethrough is inserted in the crucible to quiet the melt, a filler funnel emptying material to be molten outside of the ring while the monocrystal is pulled from inside the ring.
Claims13
Apparatus for pulling monocrystal from a melt, comprising:
- a vacuum chamber;
- a melting crucible in said chamber, said crucible having a bottom surface and an upper margin;
- pulling means above said crucible for pulling monocrystal from a melt therein;
- a cover above the upper margin of the crucible and having a central opening through which monocrystal is pulled;
- a first heating element comprising a substantially flat first radiant heat source below the bottom surface of said crucible and having a central opening to accommodate support means for said crucible;
- and
- a second heating element comprising a plate-like second radiant heat source parallel to said first radiant source and lying between the cover and the upper margin of said crucible and having a central opening through which monocrystal is pulled, the second heating element acting directly on the surface of the melt to maintain the monocrystal in a molten state in the crucible.
Dependencies are inferred from the claim text.