US 5,180,478 AGranted

Sputter coating source

AssigneeIntevac, Inc.

InventorJohn L. Hughes

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Abstract

Sputter coating source in which the target is mounted directly on the front side of the cathode and coolant is circulated on the back side of the cathode. The coolant does not contact the target, and the target is clamped tightly to the cathode by retainers which permit it to be removed and replaced easily without leakage of coolant.

Claims7

Dependent claims

In a magnetically enhanced sputter coating source adapted to sputter deposit magnetic materials:

a cathode pole structure having a front side and a back side and comprising ferromagnetic material capable of supporting a magnetic field, an anode insulated electrically from said cathode pole structure, means for applying an electrical potential between the anode and said cathode pole structure, means adapted to support and removably mount a target of magnetic material on the front side of said cathode pole structure, magnetic means positioned at the rear side of said cathode pole structure, means for creating a magnetic field extending outwardly from said magnetic means and through said cathode pole structure and through a magnetic target mounted on said cathode pole structure and into a region in front of the target, means defining a cooling passageway on the back side of said cathode pole structure and between said cathode pole structure and said magnetic means, an annular recessed area in the back side of said cathode pole structure which reduces the cathode pole thickness in such area, said recessed area being connected to said cooling passageway to enhance the cooling effect through the recessed area in said cathode pole structure to readily cause magnetic saturation in said cathode pole structure adjacent to said recessed portion and through a ferromagnetic target in position on said cathode pole structure when a magnetic field is created by said magnetic means, means for passing a coolant through the passageway to cool said cathode pole structure and the target, and means sealing the front side of said cathode pole structure so that the coolant does not come into direct contact with a target in position on said cathode pole structure and so that the coolant remains contained when a target is not in place on said cathode pole structure or in the event that a target is eroded through by the sputtering of material therefrom.

In a magnetically enhanced sputter coating source to deposit magnetic materials:

an axially extending anode, a cathode having a body with an axially facing front surface and the rear surface of an annular plate of ferromagnetic material capable of supporting a magnetic field therethrough fixedly mounted against the front surface of the body, the rear surface of said plate having an annular recessed area which reduces the plate thickness in such area, means to create a magnetic field which extends through said plate outwardly of said cathode, a support means for an annular target of magnetic material adapted to be removably mounted on the front surface of the pate, an annular cooling passageway at the junction of the body and the plate, said recessed area of said plate being in fluid connection with said passageway, means for passing a coolant through the passageway to cool the plate and a target mounted thereon, and means providing a liquid-tight seal between the body and the plate on either side of the passageway to prevent the coolant from getting to the front side of the plate.

Dependencies are inferred from the claim text.

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Abstract

In a magnetically enhanced sputter coating source adapted to sputter deposit magnetic materials:

a cathode pole structure having a front side and a back side and comprising ferromagnetic material capable of supporting a magnetic field, an anode insulated electrically from said cathode pole structure, means for applying an electrical potential between the anode and said cathode pole structure, means adapted to support and removably mount a target of magnetic material on the front side of said cathode pole structure, magnetic means positioned at the rear side of said cathode pole structure, means for creating a magnetic field extending outwardly from said magnetic means and through said cathode pole structure and through a magnetic target mounted on said cathode pole structure and into a region in front of the target, means defining a cooling passageway on the back side of said cathode pole structure and between said cathode pole structure and said magnetic means, an annular recessed area in the back side of said cathode pole structure which reduces the cathode pole thickness in such area, said recessed area being connected to said cooling passageway to enhance the cooling effect through the recessed area in said cathode pole structure to readily cause magnetic saturation in said cathode pole structure adjacent to said recessed portion and through a ferromagnetic target in position on said cathode pole structure when a magnetic field is created by said magnetic means, means for passing a coolant through the passageway to cool said cathode pole structure and the target, and means sealing the front side of said cathode pole structure so that the coolant does not come into direct contact with a target in position on said cathode pole structure and so that the coolant remains contained when a target is not in place on said cathode pole structure or in the event that a target is eroded through by the sputtering of material therefrom.