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AssigneeUnited Solar Systems Corporation
InventorsGary M. DiDio, Kermit Jones, Kevin Hoffman, Timothy Laarman, Jon Call, Prem Nath
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In continuous apparatus for the glow discharge deposition of amorphous silicon alloy solar cells of p-i-n-type configuration in a plurality of interconnected, dedicated deposition chambers, a plasma bar operatively disposed between at least the plasma regions in which the layer pairs of amorphous silicon alloy material defining the major semiconductor junction of the solar cell are deposited. The plasma bar is adapted to initiate a plasma so as to prevent chemically adsorbed contaminants from deleteriously affecting the surface of the first deposited of the layer pair, thereby improving the open circuit voltage of the solar cell. In a similar manner, the plasma bar may also be provided between the layer pairs of amorphous silicon alloy material which combine to define the minor semiconductor junction of the solar cell. Finally, a plasma bar may be disposed between the oxide-based layer of a back reflector for reducing oxygen contamination of the silicon alloy material deposited thereupon.
In a multiple chamber glow discharge apparatus of the type comprising a plurality of deposition chambers and means for continuously transporting an elongated web of substrate material along a path of travel passing through said deposition chambers in sequence, wherein each deposition chamber includes:
Dependencies are inferred from the claim text.