X-ray analyzer with self-correcting feature
AssigneeHoriba, Ltd.
InventorsShintaro Komatani, Shunji Nagao, Yoshihiro Wakiyama
Life of this patent
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Abstract
An X-ray analyzer capable of reducing the effects of a shift of peak positions in an energy spectrum resulting from a change in temperature and a lapse of time in an X-ray detector to enable a highly accurate analysis. A shift of peak positions of X-rays from known positions are detected and a voltage applied to a proportional counter is controlled on the basis of the detected results. In addition, a gain in an amplifier amplifying an output from the X-ray detector may be controlled on the basis of the detected results.
Claims12
In an X-ray analyzer, in which secondary X-rays, generated when primary X-rays from an X-ray source are incident upon a sample, are detected by means of an X-ray detector and elements contained in the sample are analyzed on the basis of an output from the X-ray detector, the improvement comprising:
- a proportional counter means for measuring a shift in an energy spectrum of the detected X-rays, the response of the proportional counter means is a function of the amount of applied voltage to the X-ray detector, and
- means for varying the voltage applied to the proportional counter means in response to a shift in the energy spectrum.
An X-ray analyzer comprising:
- a source of X-rays for providing a beam of X-rays to contact a sample;
- detector means for measuring secondary X-rays that result from impact of the X-ray beam on the sample, including
- an X-ray detector for measuring the secondary X-rays, the response of the X-ray detector is a function of the amount of applied voltage to the X-ray detector;
- means for determining the energy spectrum of the detected secondary X-rays including means for determining a shift in the energy spectrum, from a known energy spectrum position, and
- means for varying the amount of applied voltage to the X-ray detector in response to the determination of the shift in the energy spectrum to compensate for the shift.
An X-ray analyzer comprising:
- a source of X-rays for providing a beam of X-rays to contact a sample;
- detector means for measuring secondary X-rays that result from impact of the X-ray beam on the sample including an X-ray detector for measuring the secondary X-rays;
- means for amplifying an output of the X-ray detector;
- means for determining the energy spectrum of the detected secondary X-rays including means for detecting a shift in the energy spectrum from a known energy spectrum position, and
- means for varying a gain of the amplifying means in response to the shift in the energy spectrum to compensate for the shift.
In an X-ray analyzer wherein secondary X-rays generated, when primary X-rays from an X-ray source are incident upon a sample, are detected by means of an X-ray detector and elements contained in said sample are analyzed on the basis of an output from said X-ray detector, the improvement comprising:
- an amplifier for amplifying the output of the X-ray detector;
- means for detecting any shift in peak positions of an X-ray energy spectrum, and
- means for varying a gain of the amplifier in response to the means for detecting.
Dependencies are inferred from the claim text.