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US 5,179,499 AGranted
Multi-dimensional precision micro-actuator
AssigneeCornell Research Foundation, Inc.
InventorsNoel C. MacDonald, Jun J. Yao
Life of this patent
Estimating the term…
Abstract
Mechanically movable microstructure fabricated from a single crystal such as silicon and actuator structures for providing a high degree of controlled, precision motion of nanometer-scale.
Claims38
A precision microactuator for movable microstructures, comprising:
- a beam having a longitudinal axis and having a first fixed end and a second remote end;
- at least one pair of opposed capacitor plates in said beam and dividing said beam into relatively movable axially aligned, longitudinal segments;
- and
- means for applying a potential across said plates to cause said relatively movable segments to move with respect to each other to cause said remote end of said beam to move along said longitudinal axis with respect to said fixed end to vary the length of the beam.
1 more element
The actuator of claim 22, further including a layer of electrically insulating nitride on selected surfaces of said capacitor plates.
Dependencies are inferred from the claim text.