Apparatus for measuring the electrical characteristics of a semiconductor wafer
AssigneeKabushiki Kaisha Toshiba
InventorsShoichi Washizuka, Takao Ohta
Life of this patent
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Abstract
A semiconductor wafer evaluation apparatus, wherein a conductivity detector and a carrier mobility detector are independently arranged so that detections can be made under optimum conditions, respectively. A wafer carrying unit is arranged so as to carry or convey a semiconductor wafer on a carrying path between the two detectors. These components are controlled by a controller. A carrier concentration is calculated from the conductivity and the carrier mobility detected by both detectors. When a partition wall for preventing interference of an electromagnetic wave is provided between the conductivity detector and the carrier mobility detector, interference between the two detectors is further reduced.
Claims11
An apparatus for measuring the electrical characteristics of a semiconductor wafer comprising:
- a conductivity detector for allowing an eddy current to be produced on a semiconductor wafer to detect the magnitude of said eddy current to determine the conductivity of said semiconductor wafer,
- a carrier mobility detector for allowing an eddy current to be produced on said semiconductor wafer to detect the Hall electromotive force produced in a magnetic field by said eddy current to determine the carrier mobility,
- said conductivity detector and said carrier mobility detector being independently arranged so that detections can be made under optimum conditions, respectively,
- means for calculating a carrier concentration of said semiconductor wafer on the basis of a relationship among said conductivity, carrier mobility and carrier concentration using values of said conductivity and said carrier mobility which have been determined and for controlling the respective operations of said conductivity detector, said carrier mobility detector and said wafer carrying means, in accordance with a predetermined procedure so that the measuring of conductivity and the measurement of carrier mobility are carried out in succession, and
- first wafer carrying means for carrying said semiconductor wafer between said conductivity detector and said carrier mobility detector.
Dependencies are inferred from the claim text.