Linear motor system

A linear motor system, including:

• a rail type base fixedly provided;
• a stator fixed on said base and having a plurality of magnetic poles formed in a longitudinal direction thereof, each magnetic pole having a coil wound thereabout and a plurality of magnetic pole teeth formed on an upper face thereof;
• a moving member mounted movably on said stator through linear bearings and having a plurality of teeth formed on a lower face thereof along a line of travel of said moving member;
• a table attached to said moving member for movement therewith;
• a flat thin film of non-magnetic material provided on said moving member and covering lower surfaces of said teeth of said moving member;
• and
• a pair of dust particle removing members fixed on said stator at spaced locations along said line of travel, each dust particle removing member having a tip end disposed sufficiently close to said thin film to remove dust therefrom, but not touching said thin film.

A linear motor system, including:

• a fixed base;
• a moving member movably mounted to said base through linear bearings and cooperable rails;
• one of said base and said moving member having a plurality of magnetic poles arranged along a line of travel of said moving member, each magnetic pole having a plurality of pole teeth arranged along said line of travel, the other of said base and said moving member having teeth arranged along said line of travel with end surfaces in opposition to end surfaces of said magnetic pole teeth;
• a flat thin film of non-magnetic material provided on said other of said base and said moving member and covering said end surfaces of the respective said teeth thereof;
• and
• a pair of dust particle removing members provided at opposite end portions of said one of said base and said moving member as considered along said line of travel, each dust particle removing member having a tip end disposed sufficiently close to said thin film to remove dust therefrom, but not touching said thin film.