Computer control of the electron microscope sample stage
AssigneeChi & Associated Inc.
InventorLiqin Wang
Life of this patent
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Abstract
A method and apparatus for controlling the tilting of the sample stage of an electron microscope along X and Y axes are disclosed. A plurality of different orientations are displayed stereoscopically on a monitor with a spot representing the current orientation being highlighted. The control signals which cause the sample to tilt are generated by moving a cursor on the stereoscopic projection.
Claims12
Apparatus for controlling the tilting of the sample stage of an electron microscope along respective x and y axes, comprising:
- means for tilting the sample stage about respective s and y axes in response to control signals;
- means for generating a plurality of different orientations of the sample and stereoscopically displaying said plurality of orientations on a monitor to form a stereoscopic projection to be observed by an operator;
- and
- means for generating said control signals by moving a cursor on said stereoscopic projection to a desired x and y tilt angle of said sample stage.
A method for controlling the tilting of the sample stage of an electron microscope along respective x and y axes, comprising:
- tilting the sample stage about respective and axes in response to control signals;
- generating a plurality of different orientations of the sample stage and stereoscopically displaying said plurality of orientations on a monitor to form a stereoscopic projection to be observed by an operator;
- and
- generating said control signals by moving a cursor on said stereoscopic projection to a desired x and y tilt angle of said sample stage.
Dependencies are inferred from the claim text.