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US 5,179,188 AGranted
Crosslinkable fluorinated aromatic ether composition
AssigneeRaychem Corporation
InventorsFrank W. Mercer, Timothy D. Goodman, Aldrich N. K. Lau, Lanchi P. Vo
Life of this patent
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Abstract
Fluorinated polyether compositions having reactive end gorups, such as ##STR1## can be crosslinked to produce cured films useful as dielectrics for microelectronic applications. Other reactive end groups such as allyl, benzocyclobutyl, N-phenylmaleimido, alkynylphenyyl, styryl, allylphenyl, cyanophenyl, and triazenophenyl are also suitable.
Claims6
A composition (a) comprising 3 to 30 repeat units of the formula ##STR32## wherein --W-- is ##STR33## wherein each --A is independently --F, --Cl, --Br, --CF.sub.3, --CH.sub.3, --CH.sub.2 CH.dbd.CH.sub.2, or --C.sub.6 H.sub.5 ;
- p is 0, 1, or 2;
- --Z-- is a direct bond, or Z is --C(CH.sub.3).sub.2 --, --C(CF.sub.3).sub.2 --, --O--, --S--, --SO.sub.2 --, --CO--, --P(C.sub.6 H.sub.5)--, --C(CH.sub.3)(C.sub.6 H.sub.5), --C(C.sub.6 H.sub.5).sub.2 --, --(CF.sub.2).sub.1-6 --, ##STR34## wherein --Y-- is --O-- or Y is a direct bond;
- and m is 0, 1, or 2;
- each --X is independently --H, --Cl, --Br, --CF.sub.3, --CH.sub.3, --CH.sub.2 CH.dbd.CH.sub.2, or --C.sub.6 H.sub.5 ;
- q is 0, 1, or 2;
- and n is 1 or 2;
- and (b) being terminated at each end with a reactive end group --L which is --CH.sub.2 --CH.dbd.CH.sub.2, --CH.sub.2 --C.tbd.CH, ##STR35## where --R.sub.1 is --H, C.sub.1 -C.sub.4 alkyl, or --C.sub.6 H.sub.5 ;
- --R.sub.2 is H, C.sub.1 -C.sub.4 alkyl, --CN, or --C.sub.6 H.sub.5 ;
- --R.sub.3 is --H, --C.sub.6 H.sub.5, or --Si(CH.sub.3).sub.3 ;
- and
- --R.sub.4 is C.sub.1 -C.sub.4 alkyl or phenyl.
8 more elements
Dependencies are inferred from the claim text.