High purity hydroxy-terminated phenyl ladder polysiloxane and method for producing the same
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsShigeyuki Yamamoto, Hiroshi Adachi
Life of this patent
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Abstract
High purity hydroxy-terminated phenyl and alkenyl substituted ladder polysiloxane, which contains therein 1 ppm or below of each of sodium, potassium, iron, copper, lead and chloride, and 1 ppb or below of each of uranium and thorium, and is represented by the following general formula (I): ##STR1## where: R.sub.1 is phenyl and R.sub.2 is an alkenyl group; n is an integer of from 7 to 1600; m and l are natural numbers satisfying relationships of 2n=m+l and l/m+l.gtoreq.0.02. The high purity hydroxy-terminated ladder polysiloxane contains photosensitive groups in its side chain and is useful as a protective film and as an interlayer insulating film in the production of semiconductor elements.
Claims8
A high purity hydroxy-terminated phenyl and alkenyl substituted ladder polysiloxane, which contains therein 1 ppm or below of each of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and is represented by the following formula:
- ##STR12## where R.sub.1 is phenyl and R.sub.2 is an alkenyl group;
- n is an integer of from 7 to 1600m and l are natural numbers satisfying relationships of 2n=m+l and l/m+l.gtoreq.0.02.
A high purity hydroxy-terminated phenyl and alkenyl substituted ladder siloxane prepolymer which contains therein 1 ppm or below of each of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and is represented by the following formula (I):
- ##STR13## where:
- R.sub.1 is phenyl and R.sub.2 is an alkenyl group;
- n is an integer of from 7 to 16;
- m and l are natural numbers satisfying relationships of 2n=m+l and l/m+l.gtoreq.0.02.
A method for producing a high purity hydroxy-terminated phenyl and alkenyl substituted ladder siloxane prepolymer which contains therein 1 ppm or below of each of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and is represented by the formula (I) ##STR14## where R.sub.1 is phenyl and R.sub.2 is an alkenyl group;
- n is an integer of from 7 to 16;
- m and l are natural numbers satisfying relationships of 2n=m+l and l/m+l.gtoreq.0.02, said method comprising the steps of:
- preparing a solution by dissolving into an organic solvent a mixture prepared by mixing phenyl trichlorosilane with 2 mol % or above of a compound of the formula (II) ##STR15## where X is a hydrogen atom, methyl group, ethyl group or phenyl group;
- p is an integer of from 0 to 10, the concentration of said mixture in said organic solvent being from 0.05 to 0.45 g/ml;
- then hydrolyzing the solution by adding 3 to 30 mol parts of super-demineralized water to 1 mol par in total of said phenyl trichlorosilane and said compound of the formula (II), at room temperature or below;
- and thereafter rinsing said hydrolyzed product with super-demineralized water.
A method for producing a high purity hydroxy-terminated phenyl and alkenyl substituted ladder polysiloxane which contains therein 1 ppm or below of each of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and is represented by the formula (I) ##STR16## where R.sub.1 is phenyl and R.sub.2 is an alkenyl group;
- n is an integer of rom 7 to 1600;
- m and l are natural number satisfying relationships of 2n=m+l and l/m+l.gtoreq.0.02, said method comprising the steps of:
- preparing a solution by dissolving into an organic solvent a mixture prepared by mixing phenyl trichlorosilane with 2 mol % or above of a compound of the formula (II) ##STR17## where:
- X in a hydrogen atom, methyl group, ethyl group or phenyl group;
- p is an integer of from 0 to 10, the concentration of said mixture in said organic solvent being from 0.05 to 0.45 g/ml;
- then hydrolyzing the solution by adding 3 to 30 mol parts of super-demineralized water to 1 mol par in total of said phenyl trichlorosilane and said compound of the formula (II), at room temperature or below;
- thereafter rinsing said hydrolyzed product with super-demineralized water;
- adding nucleophilic reagent to the layer of said organic solvent in a quantity in the range of from 0.005 to 0.5% by weight with respect to said prepolymer;
- then heating said mixture solution to subject said hydrolyzed product to dehydration and condensation, thereby obtaining a high molecular weight substance;
- and refining said high molecular weight substance by dissolving it in a solvent at a concentration of from 2 to 8% by weight an reprecipitating it.
Dependencies are inferred from the claim text.