Integrated-optic waveguide devices and method
AssigneeTexas Instruments Incorporated
InventorsRobert M. Boysel, Gregory A. Magel
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Abstract
It is possible to utilize changes in the complex effective refractive index caused by bringing a metal membrane in close proximity to the core of an optical waveguide to form many devices. The invention described herein provides structures and processes that do so, the structure comprising a substrate, a lower cladding, a waveguide core, a removable upper cladding which supports a metal membrane, and an electrode for deflecting said membrane. Switchable devices using this structure include, but are not limited to, polarizers, mode converters, optical switches, Bragg devices, directional couplers and channel waveguides.
Claims13
A method of manufacturing an integrated-optic device comprising:
- a. defining an electrode in a substrate;
- b. forming a lower cladding upon said substrate;
- c. forming a waveguide core upon said lower cladding;
- d. forming a spacer layer upon said core;
- e. covering said spacer layer with a metal film;
- f. patterning said film with an array of access holes;
- and
- g. etching to remove some or all of said spacer layer.
Dependencies are inferred from the claim text.