Method for working ceramic material

A method of working a base material which essentially consists of a ceramic material, comprising:

• irradiating an energy beam on said base material in order to form an affected portion having cracks in said base material;
• and
• removing said affected portion, including vibrating said base material to expand and extend said cracks.

A method of working a base material which essentially consists of a ceramic material, comprising:

• irradiating an energy beam on said base material to form an affected portion having cracks in said base material;
• and
• removing said affected portion, including applying a thermal shock to said base material to expand and extend said cracks.

A method of working a base material which essentially consists of a ceramic material, comprising:

• irradiating an energy beam on said base material to form an affected portion having cracks in said base material;
• and
• removing said affected portion, including vibrating and etching said base material at the same time.

A method of working a base material which essentially consists of a ceramic material, comprising:

• irradiating an energy beam on said base material to form an affected portion having cracks in said base material;
• and
• removing said affected portion by etching said affected portion and applying a thermal shock to said base material to extend and expand said cracks.

A method of working a base material which essentially consists of a ceramic material, comprising:

• irradiating an energy beam on said base material to form an affected portion having cracks in said base material;
• and
• removing said affected portion by etching the affected portion having the cracks therein extended and expanded by vibration.