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US 5,178,658 AGranted
Method for forming an optical waveguide by selective volatization
AssigneeThe Charles Stark Draper Laboratory, Inc.
InventorsRichard P. Tumminelli, Farhad Hakimi, John R. Haavisto
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Abstract
A method of forming an optical waveguide which includes the steps of forming on a substrate a waveguide layer including at least one host medium and one dopant medium, one of which is more volatile than the other; and heating the waveguide layer to selectively volatize the more volatile medium along a path, raising the index of refraction and creating a waveguide along the path.
Claims11
A method of forming an optical waveguide comprising:
- forming on a substrate a waveguide layer containing at least one host and a plurality of dopants each of which separately tends to raise the index of refraction of said layer and in combination have an effect on the index of refraction which is less than the cumulative effect of each of the dopants;
- and
- heating said waveguide layer to selectively volatize the more volatile of said dopants along a path raising the index of refraction and creating a waveguide along the path.
A method of forming an optical waveguide comprising:
- depositing on a substrate a single, doped silica layer containing plurality of dopants each of which separately tends to raise the index of refraction of said layer and in combination have an effect on the index of refraction which is less than the cumulative effect of each of the dopants;
- and
- irradiating with a laser beam a path along the layer for heating, and selectively volatizing said at least one volatile dopant and raising the index of refraction of said layer to create a waveguide along the irradiated path.
Dependencies are inferred from the claim text.