Method and apparatus for supplying oil to a vacuum pump
AssigneeLeybold Aktiengesellschaft
InventorsThomas Abelen, Lutz Arndt, Winfried Kaiser, Peter Muller, Dieter Vorberg
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AssigneeLeybold Aktiengesellschaft
InventorsThomas Abelen, Lutz Arndt, Winfried Kaiser, Peter Muller, Dieter Vorberg
Estimating the term…
A two-stage rotary vane vacuum pump includes a pre-vacuum stage having a pre-vacuum pumping chamber and an outlet valve; a main oil sump; and a first oil conduit having a first opening communicating with the main oil sump and a second opening communicating with the pre-vacuum pumping chamber. The first opening is located at a level below an operational oil level in the main oil sump. There is further provided an intermediate oil sump situated at a level above the outlet valve and being arranged for receiving oil from the pre-vacuum pumping chamber; and a second oil conduit leading from the intermediate oil sump to components of the vacuum pump to be supplied with oil. All such components are situated at a level below the intermediate oil sump.
A two-stage rotary vane vacuum pump comprising
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