Microvalve

A microvalve with a multi-layer structure for regulating or controlling fluid flows with a first layer, in which at least one feed connector and at least a first return connector is structured, and with a second layer which is connected via an at least first structured intermediate layer with the first layer, where means are structured in the second layer which are electrostatically operable, because of which the degree of opening of the at least one feed connector can be changed, characterized in that

• at least two working connectors (A, B) and at least a second return connector (T2) are structured in the first layer (1),
• the microvalve is formed symmetrically in respect to the second layer (2), in that a third layer (3), structured mirror-reversed in respect to the first layer (1), is applied to the second layer (2) via a further structured intermediate layer (5), having at least two further working connectors (A', B') and at least a further feed connector (P'), where each of two connectors located opposite each other in the first layer (1) and the second layer (2) form a pair, and
• at least one flat slider (20), displaceable in the layer level and having at least two flow-through openings (24, 25) is structured in the second layer (2) as an electrostatically operable means.