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US 5,177,908 AGranted
Polishing pad
AssigneeMicron Technology, Inc.
InventorMark E. Tuttle
Life of this patent
Estimating the term…
Abstract
A polishing pad for semiconductor wafers, having a face shaped to provide a constant, or nearly constant, surface contact rate to a workpiece such as a semiconductor wafer, in order to effect improved planarity of the workpiece. The favored face shape is a sunburst pattern having nontapered rays, coaxial with the pad's rotation.
Claims18
Apparatus to polish a workpiece, comprising:
- a polishing pad, rotatable about an axis and having a face perpendicular to and coaxial with said axis;
- said face, in use, to be urged against the workpiece to facilitate polishing of same;
- wherein said face is configured to be able to provide to the workpiece a surface contact rate having a magnitude independent of radius from said axis, and wherein said surface contact rate is constant, or nearly so, for any radius bounded by an inner radius and an outer radius, wherein said face is shaped by at least one series of grooves, and wherein a first distance, between first and second adjacent grooves within said series of grooves, is oppositely related to a smallest radius between said first groove and said axis.
A method of polish a workpiece, comprising the steps of:
- providing a polishing pad, rotatable about an axis and having a face perpendicular to and coaxial with said axis, said face wherein a first distance, between first and second adjacent grooves within said series of grooves, is oppositely related to a smallest radius between said first groove and said axis;
- and
- urging said face against the workpiece to facilitate polishing of same;
- wherein said face, by virtue of its shape, is able to provide a constant, or nearly so, surface contact rate to the workpiece for any radius bounded by an inner radius and an outer radius from said axis, said radii being sufficiently different to accommodate the workpiece between them.
1 more element
A method to polish a workpiece, comprising the steps of:
- providing a polishing pad, rotatable about an axis and having a face perpendicular to and coaxial with said axis;
- and
- urging said face against the workpiece to facilitate polishing of same;
- wherein said face, by virtue of its shape, is able to provide to the workpiece a surface contact rate having a magnitude independent of radius from said axis, wherein said surface contact rate is constant, or nearly so, for any radius bounded by an inner radius and an outer radius, and wherein said face is shaped by at least one series of grooves, and wherein a first distance, between first and second adjacent grooves within said series of grooves, is oppositely related to a smallest radius between said first groove and said axis.
1 more element
Apparatus to polish a workpiece, comprising:
- a polishing pad, rotatable about an axis and having a face perpendicular to and coaxial with said axis;
- said face shaped by at least one series of parallel grooves, and wherein a first distance, between first and second adjacent grooves within said series of grooves, is oppositely related to a smallest radius between said first groove and said axis;
- said face, in use, to be urged against the workpiece to facilitate polishing of same;
- wherein said face, by virtue of its shape, is able to provide a constant, or nearly so, surface contact rate to the workpiece for any radius bounded by an inner radius and an outer radius from said axis, said radii being sufficiently different to accommodate the workpiece between them.
1 more element
Apparatus to polish a workpiece, comprising:
- a polishing pad, rotatable about an axis and having a face perpendicular to and coaxial with said axis;
- said face shaped by multiple, orthogonally arranged series of parallel grooves, and wherein a first distance between first and second adjacent grooves within said series of grooves, is oppositely related to a smallest radius between said first groove and said axis;
- said face, in use, to be urged against the workpiece to facilitate polishing of same;
- wherein said face, by virtue of its shape, is able to provide a constant, or nearly so, surface contact rate to the workpiece for any radius bounded by an inner radius and an outer radius from said axis, said radii being sufficiently different to accommodate the workpiece between them.
1 more element
A method to polish a workpiece, comprising the steps of:
- providing a polishing pad, rotatable about an axis and having a face perpendicular to and coaxial with said axis, said face shaped by multiple, orthogonally arranged series of parallel grooves, and wherein a first distance, between first and second adjacent grooves within said series of grooves, is oppositely related to a smallest radius between said first groove and said axis;
- and
- urging said face against the workpiece to facilitate polishing of same;
- wherein said face, by virtue of its shape, is able to provide a constant, or nearly so, surface contact rate to the workpiece for any radius bounded by an inner radius and an outer radius from said axis, said radii being sufficiently different to accommodate the workpiece between them.
1 more element
Dependencies are inferred from the claim text.