Reflection soft X-ray microscope and method
AssigneeThe Trustees of Princeton University
InventorsSzymon Suckewer, Charles H. Skinner, Roy Rosser
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Abstract
A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.
Claims21
A soft X-ray reflection imaging microscope for observing surface or near surface features of an object or specimen comprising:
- a soft X-ray generator for producing soft X-ray beams;
- condenser means for receiving said soft X-ray beams, and focusing said beams to strike an area of the surface of said object at a predetermined angle, thereby causing a portion of said beams to reflect off of the surface of said object at substantially said predetermined angle;
- objective means located for receiving said reflected beams and focusing the same to form an image;
- and
- detector means for detecting the image formed by said objective means.
A method for providing a soft X-ray reflection imaging microscope, for examining specimens, said method comprising the steps of:
- directing soft X-ray beams to strike a surface of a specimen at a predetermined angle thereto for causing said X-ray beams to be reflected off of said surface of said specimen at said predetermined angle;
- and
- focusing on a detector a portion of the reflected soft X-ray beams to form an image of the region of the surface or near surface of said specimen struck by said X-ray beams.
A soft X-ray reflection imaging microscope for observing surface or near surface features of an object or specimen comprising:
- means for generating soft X-ray beams of a predetermined wavelength;
- a Schwarzschild mirror condenser, for condensing said soft X-ray beams to illuminate a given area of said specimen;
- a Schwartzchild mirror objective, for focusing soft X-ray beams reflected off of the surface of said specimen to form an image;
- and
- detector means positioned relative to said focusing means for receiving, for recording, or for visual presentation of the image formed by said focusing means.
Dependencies are inferred from the claim text.