Method and apparatus for processing errors occurring upon division of pattern to be transferred

In an apparatus for depicting a pattern with a beam of electrically charged particles,

• a circuit for suppressing error making appearance upon division of a pattern into a plurality of subpatterns with predetermined resolution, comprising:
• a first arithmetic unit for adding together a first coordinate of one of the adjacent subpatterns which is deviated from the origin serving as a reference point by a given distance and a half value of said predetermined resolution to thereby produce a first sum value whose fractional part smaller than said resolution is rounded off to obtain a first output value representing said origin;
• a subtracter for subtracting said first output value from said first coordinate to obtain a second output value;
• an adder for adding together said second output value and a length of a side of said one subpattern extending from said first coordinate in the direction to which first coordinate belongs, to thereby obtain a second sum value;
• and
• a second arithmetic unit for adding together said second sum value and the half value of said resolution to produce a third sum value whose fractional part smaller than said resolution is rounded off, to thereby obtain a second coordinate delimiting said side in cooperation with said first coordinate;
• means for using an electrically charged particle beam type pattern depicting apparatus to depict onto a substrate corrected subpatterns based upon at least one line defined by said first and second coordinates.

An apparatus for depicting a pattern with a beam of electrically charged particles, comprising means for dividing a pattern into a plurality of subpatterns each of a size suited for transfer through irradiation with said beam with a predetermined resolution, and a circuit for suppressing errors making appearance upon division of said pattern,

• said circuit comprising:
• a first arithmetic unit for adding together a first coordinate of one of the adjacent subpatterns which is deviated from the origin serving as a reference point by a given distance and a half value of said predetermined resolution to thereby produce a first sum value whose fractional part smaller than said resolution is rounded off to obtain a first output value representing said origin;
• a subtracter for subtracting said first output value from said first coordinate to obtain a second output value;
• an adder for adding together said second output value and a length of a side of said one subpattern extending from said first coordinate in the direction to which first coordinate belongs, to thereby obtain a second sum value;
• and
• a second arithmetic unit for adding together said second sum value and the half value of said resolution to produce a third sum value whose fractional part smaller than said resolution is rounded off, to thereby obtain a second coordinate delimiting said side in cooperation with said first coordinate;
• wherein said means for dividing uses said first and second coordinates to make the division of said pattern.