IC test equipment having a horizontally movable chuck carrier

Abstract

A tray, on which IC elements to be tested are arranged at a pitch P1, is disposed at a first position, a performance board, which has a plurality of testing stations at a pitch P2, is disposed at a second position, and an IC chuck carrier is guided between the first and second positions by X-axis and Y-axis rails. The IC chuck carrier has a plurality of chuck heads arranged in a line and the pitch of arrangement of the chuck heads is selectively set, by a pitch switching device, to the pitch P1 or P2. The chuck heads are set to the pitch P1 on the tray and simultaneously chuck up therefrom a plurality of IC elements. Then, the chuck heads are brought to the second position, where the pitch of the chuck heads is switched to P2 and the IC chucked by the chuck heads are simultaneously attached to the plurality of testing stations.

Dependencies are inferred from the claim text.