Method of exposure using an electron beam to provide uniform dosage and apparatus therefor
AssigneeKabushiki Kaisha Toshiba
InventorToshiyuki Suzuki
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Abstract
There are disclosed an electron exposure method and an apparatus therefor used in a process for preparing a semiconductor manufactuirng mask. In accordance with this invention, in irradiating an electron beam onto a mask blank, an irradiation is conducted in a manner to relatively decrease a beam current so that a dose quantity of the electron beam to be irradiated becomes uniform on the surface of the mask blank as the irradiation position shifts from the central portion to the peripheral portion apt to be subjected to fogging exposure of the surface of the mask blank.
Claims2
A method for exposing a mask blank using an electron beam, comprising the steps of:
- performing irradiation of said electron beam onto said mask blank by scanning said beam;
- and
- repeating said irradiation to cover an entire surface of said mask blank;
- wherein beam current is controlled in response to position information only such that a dose quantity of said electron beam is made uniform over said entire surface of said mask blank by decreasing beam current in accordance with irradiation position as said irradiation position shifts from a central position to a peripheral position.
An apparatus for applying an exposure onto a semiconductor manufacturing mask blank using an electron beam, said apparatus comprising:
- an electron gun to irradiate and scan said electron beam onto a surface of said mask blank;
- stage driving means for moving a stage on which said mask blank is supported;
- position detecting means for detecting a position of said stage;
- and
- beam current control means for adjusting a dose quantity of an electron beam outputted from said electron gun such that said dose quantity of said electron beam is made uniform over the entire surface of said mask blank by controlling a beam current such that beam current decreases in accordance with irradiation position only as said irradiation position shifts from a central position to a peripheral position.
Dependencies are inferred from the claim text.