Supported metal catalyzed production of tetrachlorosilane
AssigneeDow Corning Corporation
InventorsRoland L. Halm, Brian M. Naasz, Regie H. Zapp
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Abstract
The present invention is a process for the production of silanes from the contact of silicon metal or a silicon containing material with hydrogen chloride. The described process employs a metal or metal compound on a solid support as a catalyst which increases the production of tetrachlorosilane. The metal or metal compound is selected from a group consisting of palladium and palladium compounds, rhodium and rhodium compounds, platinum and platinum compounds, iridium and iridium compounds, tin and tin compounds, nickel and nickel compounds, and aluminum and aluminum compounds. The process is run at a temperature of about 250.degree. C. to 500.degree. C.
Claims20
A process for preparing silanes of formula H.sub.n SiCl.sub.4-n, where n is an integer from zero to four, the process comprising:
- contacting silicon with hydrogen chloride in the presence of an effective concentration of a catalyst on a solid support, where the catalyst on the solid support improves yield of tetrachlorosilane, at a temperature of about 250.degree. C. to 500.degree. C.
Dependencies are inferred from the claim text.