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US 5,176,889 AGranted
Method and apparatus for treatment of NF.sub.3 gas
AssigneeDaidousanso Co., Ltd.
InventorsAkira Yoshino, Takakazu Tomoda
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Abstract
In accordance with this invention, a waste gas containing toxic NF.sub.3 gas is contacted with a honeycomb structure of a carbonaceous material to thereby convert NF.sub.3 into nontoxic CF.sub.4 and H.sub.2 gases with high efficiency.
Claims2
A method for converting gaseous NF.sub.3 into CF.sub.4 and N.sub.2 gases, comprising passing a NF.sub.3 containing gas through a multiplicity of openings in a honeycomb structure of carbon at a temperature of about 300.degree. C. to about 600.degree. C., whereby said NF.sub.3 containing gas reacts with walls of carbon defining said openings.
Dependencies are inferred from the claim text.