Soft magnetic alloy film
AssigneeAlps Electric Co., Ltd.
InventorNaoya Hasegawa
Life of this patent
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Abstract
A soft magnetic alloy film has a composition formula expressed by Fex Mz Cw. M is at least one metallic element selected from a group consisting of Ti, Zr, Hf, Nb, Ta, Mo or W, or a mixture of these metallic elements. The composition ratio of x, z and w satisfies the relation expressed by 50 atomic % .ltoreq.x.ltoreq.96 atomic %, 2 atomic % .ltoreq.z.ltoreq.30 atomic %, 0.5 atomic % .ltoreq.w.ltoreq.25 atomic %, and x+z+w=100. The metallic structure of the soft magnetic alloy film basically consists of crystal grains having an average grain size of 0.08 .mu.m or below. The metallic structure contains the crystal phase of carbide of the element M.
Claims19
A method of forming a soft magnetic alloy film comprising a film composition with a general formula of Fex Mz Cw, wherein M is one or more metallic elements selected from a group consisting of Zr, Hf, or Ta, in that said composition has a ratio of x, z and w which satisfies a relation expressed by the following equations:
- ##EQU3## said soft magnetic alloy film having a metallic structure basically consisting of crystal grains having an average grain size of 0.08 .mu.m or below and said metallic structure containing a crystal phase of carbide of said element M;
- said method comprising the steps of:
- depositing said film using a composite target comprising an Fe target and one or more pellets of M disposed thereon, said depositing being performed in the presence of a carbon source and using sputtering deposition techniques;
- and
- heat treating said film at least 400.degree. C. for 20 minutes to precipitate a crystallite comprising M-C.
A method of forming a soft magnetic alloy film comprising a film composition with a general formula of FexTyMzCw, wherein T is Co, and M is one or more metallic elements selected from a group consisting of Zr, Hf, or Ta, in that said composition has a ratio of x, y, z and w which satisfies a relation expressed by the following equations:
- ##EQU4## said soft magnetic alloy film having a metallic structure basically consisting of crystal grains having an average grain size of 0.08 .mu.m or below and said metallic structure containing a crystal phase of carbide of said element M;
- said method comprising the steps of:
- depositing said film using a composite target comprising an Fe target, one or more pellets of M, and a pellet of T, said pellets being disposed on said Fe target, said depositing being performed in the presence of a carbon source and using sputtering deposition techniques;
- and
- heat treating said film at least 400.degree. C. for 20 minutes to precipitate a crystalline comprising M-C.
Dependencies are inferred from the claim text.