Method for forming carbonaceous films
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsKenji Itoh, Osamu Aoyagi
Life of this patent
Estimating the term…
Abstract
Cleaning a device to make a film made from carbon or containing carbon as a main ingredient is carried out by etching the interior of a deposition chamber where the film is formed, with an etching gas in a plasma state selected from the group of hydrogen, oxygen, and a gaseous fluoride, and then cleaning the interior of the deposition chamber with a cleaning gas selected from the group of argon and hydrogen in a plasma state.
Claims9
A method for eliminating a carbonaceous substance deposited on inner walls of a reaction chamber, said method comprising the steps of:
- providing said reaction chamber with said inner walls;
- evacuating said reaction chamber;
- inputting an oxygen containing gas to said reaction chamber;
- inputting an electric energy to said reaction chamber to convert said oxygen containing gas to plasma so that said carbonaceous substance is removed from said inner walls of the reaction chamber;
- removing said oxygen containing gas and said carbonaceous substance from said reaction chamber where some of the oxygen containing gas may remain on the inner walls of the reaction chamber;
- inputting a hydrogen or an inactive gas to said reaction chamber after said oxygen containing gas and said carbonaceous substance are removed from the reaction chamber;
- and
- inputting an electric energy to said reaction chamber to convert said hydrogen or inactive gas to plasma so that at least oxygen from said oxygen containing gas remaining on the inner walls of the reaction chamber is eliminated from inside the reaction chamber.
A method for eliminating a carbonaceous substance deposited on inner walls of a reaction chamber, said method comprising the steps of:
- providing said reaction chamber with said inner walls;
- evacuating said reaction chamber;
- inputting a fluorine containing gas to said reaction chamber;
- inputting an electric energy to said reaction chamber to convert said fluorine containing gas to plasma so that said carbonaceous substance is removed from said inner walls of the reaction chamber;
- removing said fluorine containing gas and said carbonaceous substance from said reaction chamber where some of the fluorine containing gas may remain on the inner walls of the reaction chamber;
- inputting a hydrogen or an inactive gas to said reaction chamber after said fluorine containing gas and said carbonaceous substance are removed from the reaction chamber;
- and
- inputting an electric energy to said reaction chamber to convert said hydrogen or inactive gas to plasma so that at least fluorine from said fluorine containing gas remaining on the inner walls of the reaction chamber is eliminated from inside the reaction chamber.
Dependencies are inferred from the claim text.