Electron emission element and method of manufacturing the same
AssigneeCanon Kabushiki Kaisha
InventorsMasahiko Okunuki, Akira Suzuki, Isamu Shimoda, Tetsuya Kaneko, Takeo Tsukamoto, Toshihiko Takeda, Takao Yonehara, Takeshi Ichikawa
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Abstract
A multi type electron emission element comprises a plurality of electrodes formed on a deposition surface of an insulating material and each having a conical portion of a single crystal, an insulating layer formed on the deposition surface and having openings respectively centered on the conical portions, and a deriving electrodes, part of which is formed near at least the concial portions, the deriving electrode being formed on the insulating layer.
Claims10
A method of manufacturing a multi type electron emission element, comprising the steps of:
- forming a plurality of recesses in an insulating substrate;
- forming a plurality of electrodes each with a conical portion on bottom surfaces of said plurality of recesses such that single crystal regions are grown centered on single nuclei in heterogeneous material regions having a sufficiently higher nucleation density than that of an insulating material on said bottom surfaces of said plurality of recesses and allowing growth of only said single nuclei;
- and
- forming a deriving electrode, part of which is formed near at least said conical portions, said deriving electrode being formed on said insulating substrate.
A method of manufacturing an electron emission element comprising an electrode formed on a deposition surface and having a conical portion, an insulating layer formed on said deposition surface and having an opening centered on said conical portion, and a deriving electrode formed on said insulating layer near said conical portion, wherein said electrode with said conical portion is formed by a single crystal region centered on a single nucleus grown in a heterogeneous material formed in said deposition surface, the heterogeneous material having a sufficiently higher nucleation density than that of a material of said deposition surface and micropatterned to allow growth of only said single nucleus.
A method of manufacturing an electron emission element, comprising the steps of:
- forming an insulating layer on a substrate having a conductive material surface;
- forming a heterogeneous material having a sufficiently higher nucleation density than that of a material of said insulating layer and micropatterned to allow growth of only a single nucleus;
- forming an opening in said insulating layer to partially expose said conductive material surface;
- and
- forming an electrode with a conical portion by growing a crystal centered on said single nucleus grown in said heterogeneous material, growing a crystal on a conductive material surface portion exposed in said opening, and connecting said conductive material surface to said electrode with said conical portion.
A method of manufacturing an electron emission element, comprising the steps of:
- forming an electrode with a conical portion centered on a single nucleus grown in a heterogeneous material formed on a deposition surface, the heterogeneous material having a sufficiently higher nucleation density than that of a material of said deposition surface and micropatterned to allow growth of only said single nucleus;
- forming an insulating layer on said electrode with said conical portion and said deposition surface and then an electrode layer on said insulating layer;
- forming an opening in said electrode layer at a position corresponding to said conical portion;
- and
- selectively etching said insulating layer through said opening to expose at least said conical portion.
A method for manufacturing an electron emitting element comprising a substrate, an emitter electrode having a conical portion for emitting an electron and a deriving electrode, the emitter electrode being disposed of a single crystal material on the substrate, said method comprising the steps of:
- preparing the substrate including a deposition surface and a heterogeneous surface having a sufficiently higher nucleation density than that of a material of the deposition surface and an area to allow growth of only a single nucleus;
- and
- forming the single nucleus on the heterogenous surface and growing a single crystal from the nucleus by using a vapor phase deposition method, thus forming an emitter electrode on the substrate.
Dependencies are inferred from the claim text.