Fluid temperature measuring device

Abstract

A fluid temperature measuring device (10) comprises a substrate (12) upon which is deposited a first insulating layer (14). A first metallic layer (16) is sputtered onto the first insulating layer (14), a second insulating layer (18) is deposited on the first metallic layer (16) and a second metallic layer (20) is sputtered onto the second insulating layer (18). The second metallic layer (20) is thin and has a low heat capacity so that it responds quickly to changes in temperature of the fluid. The first metallic layer (16) is thin and is heated by supplying an electric current from an electrical power supply (22) to maintain the first metallic layer (16) at the same temperature as the second metallic layer (20). The second metallic layer (20) is electrically connected to an electrical resistance measuring device (24) which detects temperature changes of the fluid by detecting corresponding changes of the electrical resistance of the second metallic layer (20).

Dependencies are inferred from the claim text.