Method of fabricating a semiconductor structure having an improved polysilicon layer
AssigneeMotorola, Inc.
InventorJaipal S. Verma
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Abstract
A semiconductor structure having an improved polysilicon layer is formed. After the formation of a silicon dioxide layer over a semiconductor wafer, the semiconductor wafer is heated in an ambient comprised of nitrogen. The heating is preferably accomplished so that nitridation of the silicon dioxide does not take place. Subsequently, a polysilicon layer is formed on the silicon dioxide layer. The polysilicon layer is denser and thus more resistant to hydrogen fluoride than polysilicon formed without exposing the silicon dioxide layer to nitrogen.
Claims5
A method of fabricating a semiconductor structure, comprising the steps of:
- providing a semiconductor wafer;
- forming a silicon dioxide layer on the semiconductor wafer;
- heating the semiconductor wafer in an ambient comprised of nitrogen for approximately one minute, such that nitridation of the silicon dioxide layer does not take place;
- and
- forming a polysilicon layer on the silicon dioxide layer.
A method of fabricating a semiconductor structure, comprising the steps of:
- providing a semiconductor wafer;
- forming a silicon dioxide layer on the semiconductor wafer;
- heating the semiconductor wafer in an ambient comprised of ammonia for approximately one minute, such that nitridation of the silicon dioxide layer does not take place;
- and
- forming a polysilicon layer on the silicon dioxide layer.
A method of fabricating a semiconductor structure, comprising the steps of:
- providing a semiconductor wafer;
- forming a gate silicon dioxide layer on the semiconductor wafer;
- heating the semiconductor wafer in an ambient comprised of nitrogen at a temperature of approximately 800.degree. C. to 900.degree. C. for approximately one minute, such that nitridation of the gate silicon dioxide layer does not take place;
- and
- forming a polysilicon layer on the gate silicon dioxide layer.
Dependencies are inferred from the claim text.