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AssigneeAdvanced Semiconductor Materials America, Inc.
InventorsMichael R. Bonsaver, Rand A. Conner, David P. Lambert
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A transmission line is constructed from ceramic and nickel materials to provide a characteristic impedance that matches the characteristic impedance of a boat assembly in a chemical vapor deposition system. The transmission line is interposed between a set of feedthroughs through the wall of a reactant tube and a set of contacts on the boat assembly. The transmission line improves the efficiency of the power transfer to the boat assembly from an RF power source external to the reactant tube. The transmission line is particularly advantageous at high frequencies such as, for example, 13.56 MHz. This improves the repeatability of the deposition of film on wafers in the boat assembly.
A plasma enhanced chemical vapor deposition apparatus for processing workpieces within a chamber for containing the chemical vapor and workpieces positioned in a boat assembly, comprising:
A method of improving the deposition rate and uniformity on workpieces in a plasma enhanced chemical vapor deposition system, said deposition system including a boat assembly for holding said workpieces in said plasma, said boat assembly having a first predetermined impedance at a selected frequency, said method comprising the steps of:
Dependencies are inferred from the claim text.