Method for depositing a thin film
AssigneeTexas Instruments Incorporated
InventorsAndrew J. Purdes, Francis G. Celli
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Abstract
A microwave plasma rector is disclosed comprising a vacuum chamber, a microwave generator for generating a microwave standing wave therein, inlet and outlet ports, a susceptor within the chamber, at least one dielectric plate and a heater for heating the susceptor. The dielectric plate alters the shape of the produced plasma from a sphere to a short bulging cylinder. The modified plasma ball results in increased thickness uniformity of the deposited material.
Claims12
A method for depositing a thin film of reactants onto a substrate comprising the steps:
- generating a plasma ball of reactants adjacent to a substrate;
- and
- distorting the plasma ball with a first dielectric plate, the first dielectric plate suspended above and generally parallel to the surface of the substrate.
The method of depositing a diamond film on a substrate comprising the steps of:
- generating a plasma ball of carbon and hydrogen-bearing species adjacent to the surface of a substrate;
- distorting the plasma ball with a first dielectric plate, the first dielectric plate suspended above and generally parallel to the surface of the surface of the substrate;
- and
- heating and substrate.
Dependencies are inferred from the claim text.