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US 5,174,876 AGranted
Method of making an optical component by ion implantation
AssigneeForschungszentrum Julich GmbH
InventorsChristoph Buchal, Wolfgang Sohler
Life of this patent
Estimating the term…
Abstract
An optical electronic component, in which strip waveguides of limited depth and lateral width are formed in undoped dielectric substrate, e.g. an undoped crystal, by implantation of rare-earch ions or ions of transition metals, preferably laser-active ions with energies of 50 keV to 10 MeV.
Claims9
In a process for making an optical component, the improvement which comprises the steps of:
- (a) forming in a dielectric optical component substrate over a laterally limited region thereof and in a generally elongate pattern by doping said substrate a strip light waveguide from said limited region of said substrate;
- and
- (b) additionally implanting in said waveguide over a limited length of said string light waveguide rare-earth ions or ions of a transition metal which are laser-active in the presence of the material of the waveguide to form a laser from said limited length of the waveguide, the implanting of the laser-active ions being effected at an energy of 50 KeV to 10 MeV.
Dependencies are inferred from the claim text.