Laser-assisted chemical vapor deposition

Apparatus for performing laser-assisted deposition of material on a target surface, comprising:

• a reaction chamber enclosure having a window therein;
• means for introducing a reactive gas into the interior of the reaction chamber enclosure;
• means for partially evacuating the interior of the reaction chamber enclosure;
• a laser positioned to direct a beam produced by the laser into the interior of the reaction chamber enclosure through the window;
• and
• means for producing a flow of an ionized gaseous reaction product from the interior of the reaction chamber enclosure toward a target surface, the means for producing including
• a nozzle through a wall of the reaction chamber enclosure,
• an electrode within the reaction chamber enclosure, and
• a voltage source that applies an electrical potential between the electrode and the target surface, a voltage applied by the voltage source being such that ions within the reaction chamber enclosure are accelerated toward the target surface.

Apparatus for performing laser-assisted deposition of material on a target surface, comprising:

• a reaction chamber enclosure having a window therein;
• means for introducing a reactive gas into the interior of the reaction chamber enclosure;
• means for partially evacuating the interior of the reaction chamber enclosure;
• a laser positioned to direct a beam produced by the laser into the interior of the reaction chamber enclosure through the window;
• and
• a catalyst within the reaction chamber enclosure that catalyzes a chemical reaction in a reactive gas introduced into the reaction chamber enclosure through the means for introducing;
• means for producing a flow of an ionized gaseous reaction product from the interior of the reaction chamber enclosure toward a target surface, the means for producing including
• a nozzle through a wall of the reaction chamber enclosure, the nozzle being positioned such that the laser beam directed into the interior of the reaction chamber enclosure through the window leaves the reaction chamber enclosure through the nozzle,
• an electrode within the reaction chamber enclosure, and
• a voltage source that applies an electrical potential between the electrode and the target surface, a voltage applied by the voltage source being such that ions within the reaction chamber enclosure are accelerated toward the target surface;
• and
• means for controlling the ambient atmosphere in the region of the target surface.