Uniform gas distributor to a wafer
AssigneeTexas Instruments Incorporated
InventorsDaniel White, Jr., Mary E. Weber
Life of this patent
Estimating the term…
Abstract
A gas distribution system 140 includes a gas distribution chamber 142 and a gas distributor 154. Gas distribution chamber 142 includes an open end 144 and a closed end 146. A workpiece 148 is disposed adjacent closed end 146. Gas distributor 154 includes an outer collar 156 and an inner collar 158. Inner collar 158 has a continuously increasing cross-sectional diameter from a first predetermined point 160 to a second predetermined point 162. Gases are introduced through an inlet tube 150 disposed through an aperture in a platform 152 into the interior of inner collar 158 and toward workpiece 148. A diverter 164 diverts incoming gases from inlet tube 150.
Claims35
An apparatus for distributing gas to a workpiece, comprising:
- a member having an aperture for receiving a gas;
- a collar in communication with said aperture, said collar extending from said aperture toward the workpiece and having an open end proximate the workpiece and operable to direct gas received from said aperture to the workpiece;
- and
- a diverting element disposed within an interior defined by said collar wherein said diverting element comprises:
- a first conical section;
- a second conical section;
- and
- a circularly cylindrical section between said first and second conical sections.
An apparatus for distributing gas to a workpiece, comprising:
- a member having an aperture for receiving a gas;
- a collar in communication with said aperture, said collar extending from said aperture toward the workpiece and having an open end proximate the workpiece and operable to direct gas received from said aperture to the workpiece;
- a diverting element disposed within an interior defined by said collar and intermediate said open end and said aperture;
- and
- an inlet tube disposed through said aperture, and wherein said diverting element is disposed proximate said inlet tube.
An apparatus for distributing gas to a workpiece, comprising:
- a member having an aperture for receiving a gas;
- a collar in communication with said aperture, said collar extending from said aperture toward the workpiece and having an open end proximate the workpiece and operable to direct gas received from said aperture to the workpiece;
- and
- a diverting element disposed within an interior defined by said collar wherein said diverting element comprises:
- a frusto-conical section having a smaller diameter end toward the aperture and a larger diameter end toward the workpiece;
- and
- a circularly cylindrical section extending from said large diameter end toward the workpiece.
An apparatus for distributing gas to a workpiece, comprising:
- a member having an aperture for receiving a gas;
- a collar in communication with said aperture, said collar extending from said aperture toward the workpiece and having an open and proximate the workpiece and operable to a direct gas received from said aperture to the workpiece;
- and
- a diverting element disposed within an interior defined by said collar and intermediate said open end and said aperture wherein said diverting element is hollow such that a portion of gas received from said aperture may pass therethrough and toward the workpiece.
An apparatus for distributing gas to a workpiece, said workpiece having a selected diameter, comprising:
- a member having an aperture for receiving a gas;
- a collar in communication with said aperture, said collar comprising a section having a continuously increasing cross-sectional diameter from a first predetermined point to a second predetermined point and operable to direct gas received from said aperture to the workpiece;
- and
- a diverting element disposed within an interior defined by said collar wherein said diverting element comprises:
- a first conical section;
- a second conical section;
- and
- a circularly cylindrical section between said first and second conical sections.
An apparatus for distributing gas to a workpiece, said workpiece having a selected diameter, comprising:
- a member having an aperture for receiving a gas;
- a collar in communication with said aperture, said collar comprising a section having a continuously increasing cross-sectional diameter from a first predetermined point to a second predetermined point and operable to direct gas received from said aperture to the workpiece;
- and
- a diverting element disposed within an interior defined by said collar and intermediate said open end and said aperture;
- and
- an inlet tube disposed through said aperture, and wherein said diverting element is disposed proximate said inlet tube.
An apparatus for distributing gas to a workpiece, said workpiece having a selected diameter, comprising:
- a member having an aperture for receiving a gas;
- a collar in communication with said aperture, said collar comprising a section having a continuously increasing cross-sectional diameter from a first predetermined point to a second predetermined point and operable to direct gas received from said aperture to the workpiece;
- and
- a diverting element within an interior defined by said collar, wherein said diverting element comprises:
- a frusto-conical section having a smaller diameter end toward the aperture and a larger diameter end toward the workpiece;
- and
- a circularly cylindrical section extending from said large diameter end toward the workpiece.
An apparatus for distributing gas to a workpiece, said workpiece having a selected from diameter, comprising:
- a member having an aperture for receiving a gas;
- a collar in communication with said aperture, said collar comprising a section having a continuously increasing cross-sectional diameter from a first predetermined point to a second predetermined point and operable to direct gas received from said aperture to the workpiece;
- and
- a diverting element disposed within an interior defined by said collar and intermediate said open and said aperture wherein said diverting element is hollow such that a portion of gas received from said aperture may pass therethrough and toward the workpiece.
Dependencies are inferred from the claim text.