Thick film mask separation detection system
AssigneeInternational Business Machines Corporation
InventorsGerald S. Andris, John P. Gauci, John F. Harmuth
Life of this patent
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Abstract
An apparatus and method for screening a pattern of material onto a surface including detection of the instant of separation of the mask from the surface after screening. Particularly as applied to a process for making a multi-layer ceramic device with an automated apparatus, the screening process is speeded by initiating high speed movement immediately when the separation of the mask from the surface is complete. In a preferred embodiment, a shock absorber is used to limit the rate of change of motion of the mask and a sensor is placed directly on a portion of the shock absorber structure. Noise reduction is accomplished through differential sensing and thresholding to improve detection.
Claims18
A screening apparatus including a mask, means for screening a material through said mask onto a surface to form a pattern of said material on said surface, said mask being located adjacent said surface during si screening of said material and means for separating said mask from said surface subsequent to said screening of said material through said mask, said screening apparatus including
- detector means for detecting separation of said mask from said surface, said detector means including sensor means for sensing a rate of change of a physical quantity at a location which is subject to variation, and
- means for controlling the velocity of at least one part of said screening apparatus mean in response to said detector means.
A method of producing a pattern of material on a surface by screening said material through a mask including the steps of
- detecting a rate of change of separation of said mask from said surface, and
- controlling velocity of a part of an apparatus performing at lest a portion of said method of producing a pattern on a surface in response to said detecting step.
Dependencies are inferred from the claim text.