Tomograph using phase information of a signal beam having transmitted through a to-be-inspected object
AssigneeHitachi, Ltd.
InventorsAtsushi Momose, Akira Fukuhara
Life of this patent
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Abstract
A tomograph makes use of phase information obtainable from a radiation beam having transmitted a to-be-inspected object. In one embodiment, the tomograph has an interferometer for producing interference infringes between a signal beam having transmitted through the object and a reference beam and eventually producing Moire fringes a detector for detecting the Moire fringes, and a signal processing unit for processing outputs of the detector.
Claims14
A phase-contrast tomograph in which an object is irradiated with a radiation beam in a plurality of different directions, to reconstruct a tomograph of the object from images of the object formed of a transmitted beam, each of the images of the object indicates a distribution of a phase shift of a beam having transmitted through the object, wherein the distribution of the phase shift is obtained by using an interferometer.
A tomograph of the type using phase information, comprising:
- a radiation beam source for producing a radiation beam;
- means for splitting said beam into first and second diffracted beams;
- means for establishing first and second paths for said first and second diffracted beams intersecting each other, said establishing means being arranged to receive said first and second diffracted beams;
- means for holding a to-be-inspected object on one of said first and second paths so that the diffracted beam propagating along said one path and transmitting through said object produces a signal wave beam while the other diffracted beam produces a reference beam, and interference fringes are generated in a space where said intersection takes place;
- means arranged to be located in said space for producing Moire fringes from said interference fringes;
- and
- means coupled to said Moire fringe producing means for reproducing an image representative of said object.
Dependencies are inferred from the claim text.