X-ray window and method of producing same
AssigneeSumitomo Electric Industries, Ltd.
InventorsTakahiro Imai, Naoji Fujimori
Life of this patent
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Abstract
An X-ray window having a diamond X-ray transparent film, diamond reinforcing crosspieces and a substrate on which the diamond X-ray transparent film has been grown. As reinforcing crosspieces are made of diamond, no thermal stress is generated between the X-ray transparent film and the crosspieces. This mask excels in flatness, transmittance of X-rays, and strength.
Claims6
An X-ray window comprising an X-ray transparent film made from diamond, diamond reinforcing crosspieces formed on the X-ray transparent film and a supporting ring stuck to a peripheral part of the X-ray transparent film.
An X-ray window comprising an X-ray transparent film made from diamond, a ring substrate fitted to a peripheral part of the transparent film, diamond reinforcing crosspieces formed on the X-ray transparent film and a supporting ring stuck to a peripheral part of the substrate.
An X-ray window comprising an X-ray transparent film made from diamond, a ring substrate fitted to a peripheral part of the transparent film, diamond reinforcing crosspieces formed on the X-ray transparent film and a supporting ring stuck to a peripheral part of the X-ray transparent film.
An X-ray window comprising an X-ray transparent film made from diamond, diamond reinforcing crosspieces formed on the X-ray transparent film and a supporting ring stuck to a peripheral part of the diamond reinforcing crosspieces.
Dependencies are inferred from the claim text.